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Microelectronics Research Laboratory (MERL)

Microelectronics Research Laboratory (MERL), is a Class 1000 clean room with wet and dry chemical processing, CVD, sputtering, furnaces and electrical & optical characterization equipment and a Class 100 photolithography area. The facility is available 24 hours a day, 7 days a week. A state-of-the-art metal-organic chemical vapor deposition (MOCVD) system with plasma-enhancement capabilities is used for ZnO thin film and nanostructures deposition.

The Electrical and Optical Characterization Labs are equipped with electrical, RF and optical testing equipment, including temperature controlled vacuum chamber for I-V, I-V-T and C-V testing, RF network analyzer, 1 GHz digital oscilloscope and programmable signal generator, UV-vis-IR optical absorption/transmission measurement, photoresponse, TCSPC time resolved and temperature controlled UV photoluminescence systems, and contact angle goniometer with a temperature, humidity and gas flow controlled environmental chamber.

Material growth, device fabrication and testing can be carried out in MERL and characterization labs, including for the fabrication and characterizations of ZnO multiplayer and nanostructure based novel sensors.

Primary Contact:
Yicheng Lu
Micro-Electronics Research Laboratory (MERL)
Professor, Department of Electrical and Computer Engineering
94 Brett Road
Piscataway, NJ 08854
Tel: 732-445-3466
Fax: 732-445-2820
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NR03HamiltonGate 607 Taylor Road
Piscataway, NJ 08854

P   848-445-1388
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